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Dennard scaling ended in 2005 ish with a 1nm gate ox. Continued scaling was enabled by advanced materials and overlay and cd control scaling. Overlay control scaling in 3d will continue to enable rapid energy per floating point operation reduction. 1aJ/flop will likely enable a singularity...
I respectfully disagree. The lens and scanner systems for euv are more complex and precise than the slac high energy particle detectors. But both the software and the hardware to support continued scaling will be needed in China if they want to stay close to the leading edge. Both are at issue.