You are currently viewing SemiWiki as a guest which gives you limited access to the site. To view blog comments and experience other SemiWiki features you must be a registered member. Registration is fast, simple, and absolutely free so please, join our community today!
Polysilicon is just short for POLYcristalline SILICON. Highly doped polysilicon was once used instead of metal for the gate electrode. There are (were) a few good reasons for this, but you should probably refer to a solid reference book instead on multiple YT videos if you want to understand a...
Hi, I see a major problem in your pdf: in step 7, n-doped silicon cannot magically appear in the voids of step 6 (certainly not as a consequence of PR removal). As a matter of fact, in step 6 there is no reason to etch away that bit of silicon below the oxide. Doping (typically performed by ion...