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Thread: I would like to know the approach using by tsmc , samsung , intel for SADP process ?

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    I would like to know the approach using by tsmc , samsung , intel for SADP process ?

    For lower nodes like 10nm and 7nm , foundries are using SADP process for processing of Mx layers . I would like to know what is the approach
    using by tsmc/samsung/intel for these SADP layers ?

    The various approaches are 1. Traditional SID-SADP (Block Mask) 2. Mandrel Fill/Cut Mask SID-SADP 3. SIM SADP .


    Thanks,
    Naga.

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    Chances are the foundries will start with LEx4 for this year's newest nodes, but GlobalFoundries did publish an SPIE 2017 paper (Exploiting Regularity: Breakthroughs in Sub-7nm Place-and-Route) where they could design SAQP-friendly layouts, i.e., one (193i) cut mask at metal level. I suspect since they haven't worked with SADP as much as memory companies or Intel, pure-play foundries haven't got enough experience to start on the SADP or SAQP options yet.

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    Last edited by Fred Chen; 22 Hours Ago at 04:15 PM.
     

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