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Thread: I would like to know the approach using by tsmc , samsung , intel for SADP process ?

  1. #1
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    I would like to know the approach using by tsmc , samsung , intel for SADP process ?

    For lower nodes like 10nm and 7nm , foundries are using SADP process for processing of Mx layers . I would like to know what is the approach
    using by tsmc/samsung/intel for these SADP layers ?

    The various approaches are 1. Traditional SID-SADP (Block Mask) 2. Mandrel Fill/Cut Mask SID-SADP 3. SIM SADP .


    Thanks,
    Naga.

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