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Thread: Hydrogen-induced blistering of Mo/Si thin film multilayers

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    Hydrogen-induced blistering of Mo/Si thin film multilayers

    https://www.differ.nl/sites/default/...2014_56992.pdf

    Hydrogen is the most insidious element in thin film processing. In this case, we have blistering of what's supposed to be an atomically smooth optical surface. Hydrogen is mostly trapped at the outermost bi-layer, but can be driven deeper by ion flux.

    3 Not allowed!
    Last edited by Fred Chen; 3 Weeks Ago at 02:26 PM.
     

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