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Thread: Strong Q3-2017 results ASML

  1. #21
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    Latest detailed info on the EUV 3400 scanner and the EUV ecosystem can be viewed in this talk on

    EUV Source for High Volume Manufacturing:Performance at 250 W and Key Technologies for Power Scaling
    by Igor Fomenkov ASML Fellow

    presented at 2017 Source Workshop, Dublin, Ireland, November 7th.

    On their research platform ASML has achieved 375W in-burst at 50kHz, so it seems steady progress is made to higher EUV source power. Progress on the pellicles seems to be made as well.

    See the full details in the slides here:
    https://www.euvlitho.com/2017/S1.pdf

    Happy Holidays,

    User NL

    0 Not allowed!
    Last edited by user nl; 12-22-2017 at 08:22 AM.
     

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